IEEE micro electro mechanical systems an investigations [sic] of micro structures, sensors, actuators, machines, and robotic systems : proceedings, Oiso, Japan, January 25-28, 1994 / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center.

Format Electronic
Publication Info[New York : Institute of Electrical and Electronics Engineers],
Descriptionxiv, 360 p. : ill. ; 30 cm.
Supplemental ContentFull text available from IEEE Conference Proceedings Archive
Supplemental ContentFull text available from IEEE Electronic Library (IEL) Conference Proceedings
Supplemental ContentFull text available from IEEE Electronic Library (IEL)
Subjects
Electromechanical devices--Congresses.
Microelectronics--Congresses.
Detectors--Congresses.
Actuators--Congresses.

Other author/creatorIEEE Robotics and Automation Society.
Other author/creatorAmerican Society of Mechanical Engineers. Dynamic Systems and Control Division.
Other author/creatorMicromachine Center (Japan)
Other author/creatorIEEE Xplore (Online service)
Other author/creatorIEEE Workshop on Micro Electro Mechanical Systems (1994 : Ōiso-machi, Japan)
General note"IEEE Workshop on Micro Electro Mechanical Systems"--P. iii.
General note"IEEE catalog number 94CH3404-1."
General noteTitle on spine: IEEE Micro Electro Mechanical Systems Workshop.
Bibliography noteIncludes bibliographical references and index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
Other titleIEEE micro electro mechanical systems workshop.
Other titleMicro electro mechanical systems.
LCCN 94233310
ISBN078031834X (casebound)
ISBN0780318331 (softbound)
ISBN0780318358 (microfiche)

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Electronic Resources ✔ Available