Acoustic wave and electromechanical resonators concept to key applications / Humberto Campanella.

Author/creator Campanella, Humberto
Format Electronic
Publication InfoNorwood, MA. : Artech House,
Descriptionxv, 345 p. : ill. ; 26 cm.
Supplemental ContentFull text available from Ebook Central - Academic Complete
Subjects

Variant title Acoustic wave & electromechanical resonators
SeriesIntegrated microsystems series
Artech House integrated microsystems series. ^A887401
Contents 1. MEMs and NEMs resonator technologies -- 2. Acoustic microresonator technologies -- 3. Design and modeling of micro- and nanoresonators -- 4. Fabrication techniques -- 5. Characterization techniques -- 6. Performance optimization -- 7. Integration of resonator to CMOS technologies -- 8. Sensor applications -- 9. Radio frequency applications -- 10. Case studies.
Bibliography noteIncludes bibliographical references and index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 2010278239
ISBN9781607839774
ISBN1607839776

Availability

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Electronic Resources Access Content Online ✔ Available