Extreme ultraviolet lithography / [edited by] Banqiu Wu, Ajay Kumar.

Other author Wu, Banqiu.
Other author Kumar, Ajay, 1962-
Format Electronic
Publication InfoNew York : McGraw-Hill,
Descriptionxiv, 465 p. : ill. ; 24 cm.
Supplemental ContentFull text available from Digital Engineering Library
Supplemental ContentFull text available from AccessEngineering
Subjects
Extreme ultraviolet lithography.
Integrated circuits--Masks.
Integrated circuits--Design and construction.

Bibliography noteIncludes bibliographical references and index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 2009002187
ISBN9780071549189 (alk. paper)
ISBN0071549188 (alk. paper)

Availability

Library Location Call Number Status Item Actions
Electronic Resources ✔ Available