Characterization and metrology for ULSI technology 2000 International Conference,Gaithersburg, Maryland, 26-29, June 2000 / editors David G. Seiler ... [et al.].
| Other author | Seiler, David G. |
| Other author | International Conference on Characterization and Metrology for ULSI Technology (1998 : Gaithersburg, Md.) |
| Format | Electronic |
| Publication Info | Melville, N.Y. : American Institute of Physics, |
| Description | 2 v. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.) |
| Supplemental Content | Full text available from AIP Conference Proceedings |
| Subjects |
| Series | AIP Conference Proceedings ; vol. 550 AIP conference proceedings ; no. 550. ^A24766 |
| General note | "The 2000 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from June 26 to June 29, 2000"--Pref. |
| General note | Accompanying computer disc contains full text from the book. |
| Bibliography note | Includes bibliographical references and index. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 00111547 |
| ISBN | 156396967X |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |