Characterization and metrology for ULSI technology 2000 International Conference,Gaithersburg, Maryland, 26-29, June 2000 / editors David G. Seiler ... [et al.].

Other author Seiler, David G.
Other author International Conference on Characterization and Metrology for ULSI Technology (1998 : Gaithersburg, Md.)
Format Electronic
Publication InfoMelville, N.Y. : American Institute of Physics,
Description2 v. : ill. ; 28 cm. + 1 CD-ROM (4 3/4 in.)
Supplemental ContentFull text available from AIP Conference Proceedings
Subjects

SeriesAIP Conference Proceedings ; vol. 550
AIP conference proceedings ; no. 550. ^A24766
General note"The 2000 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from June 26 to June 29, 2000"--Pref.
General noteAccompanying computer disc contains full text from the book.
Bibliography noteIncludes bibliographical references and index.
Access restrictionAvailable only to authorized users.
Technical detailsMode of access: World Wide Web
Genre/formElectronic books.
LCCN 00111547
ISBN156396967X

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Electronic Resources Access Content Online ✔ Available