Microelectronics processing : chemical engineering aspects / Dennis W. Hess, editor, Klavs F. Jensen, editor.
| Other author | Hess, Dennis W. |
| Other author | Jensen, Klavs F., 1952- |
| Format | Book |
| Publication Info | Washington, DC : American Chemical Society, ©1989. |
| Description | xiv, 547 pages : illustrations ; 24 cm. |
| Subjects |
| Series | Advances in chemistry series ; 221 Advances in chemistry series 221. ^A91 |
| Local note | Joyner-FOR JOYNER LIBRARY HOLDINGS OF THE SERIES, ADVANCES IN CHEMISTRY SERIES, SEARCH BY CALL NUMBER QD1 .A355. |
| Bibliography note | Includes bibliographical references. |
| LCCN | 89006862 |
| ISBN | 0841214751 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | General Stacks | QD1 .A355 NO. 221 | ✔ Available | Place Hold |