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001 ocn227954836;

003 OCoLC;

005 20141212020035.0;

006 m d f ;

007 cr bn|||||||||;

008 080513s2007 mdua obt f000 0 eng d;

035 a| (Sirsi) o227954836;

049 a| ERE#;

074 a| 0324-A-01 (online);

086 0 a| D 101.133:4284;

100 1 a| Zakar, Eugene.=| ^A1099165;

245 10 a| Surface analysis of reactive ion etched PZT thin films in SF6 plasma /c| Eugene Zakar.;

260 a| Adelphi, MD :b| Army Research Laboratory,c| [2007];

300 a| 1 online resource (iv, 10 pages) :b| illustrations.;

336 a| text2| rdacontent;

337 a| computer2| rdamedia;

338 a| online resource2| rdacarrier;

490 1 a| ARL-TR ;v| 4284;

513 a| Final;b| October 2005 to Septembe 2006.;

500 a| Title from title screen (viewed on Feb. 23, 2012).;

500 a| "September 2007.";

504 a| Includes bibliographical references (p. 8-9).;

650 0 a| Surfaces (Technology)x| Analysis.=| ^A216140;

650 0 a| Thin films.=| ^A26073;

650 0 a| Piezoelectricity.=| ^A256637;

710 2 a| U.S. Army Research Laboratory.=| ^A367731;

776 08 i| Print version:a| Zakar, Eugene.t| Surface analysis of reactive ion etched PZT thin films in SF6 plasmaw| (OCoLC)777943081;

830 0 a| ARL-TR (Aberdeen Proving Ground, Md.) ;v| 4284.=| ^A566074;

856 40 u| https://purl.fdlp.gov/GPO/gpo19262;

949 a| Click on web addressw| ASISh| JOYNER94;

998 a| 2991458;

998 a| u2991458;

596 a| 1;

999 a| CLICK ON WEB ADDRESSw| ASISc| 1i| 2991458-1001l| JNETm| JOYNERr| Ys| Yt| JNE1DOu| 4/25/2012x| EDOCUMENTz| JERESOURCE;

Surface analysis of reactive ion etched PZT thin films in SF6 plasma / Eugene Zakar.

Author/creator	Zakar, Eugene
Other author	U.S. Army Research Laboratory.
Format	Electronic
Publication Info	Adelphi, MD : Army Research Laboratory, [2007]
Description	1 online resource (iv, 10 pages) : illustrations.
Supplemental Content	https://purl.fdlp.gov/GPO/gpo19262
Subjects	Surfaces (Technology)--Analysis. Thin films. Piezoelectricity.

Series	ARL-TR ; 4284 ARL-TR (Aberdeen Proving Ground, Md.) ; 4284. ^A566074
General note	Title from title screen (viewed on Feb. 23, 2012).
General note	"September 2007."
Bibliography note	Includes bibliographical references (p. 8-9).
Report note	Final; October 2005 to Septembe 2006.
Issued in other form	Print version: Zakar, Eugene. Surface analysis of reactive ion etched PZT thin films in SF6 plasma
GPO item number	0324-A-01 (online)
Govt. docs number	D 101.133:4284

Library	Location	Call Number	Status	Item Actions
	Electronic Resources	Access Content Online	✔ Available

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