Etching characteristics and surface analysis of molecular bean epitaxy grown P-type aluminum gallium nitride with boron trichloride/chlorine gases in inductively coupled plasma (ICP) dry etching / Fred Semendy, Phillip Boyd, and Unchul Lee.
| Author/creator | Semendy, Fred |
| Other author | Boyd, Phillip. |
| Other author | Lee, Unchul. |
| Other author | U.S. Army Research Laboratory. |
| Format | Electronic |
| Publication Info | Adelphi, MD : Army Research Laboratory, [2004] |
| Description | 1 online resource (iv, 15 pages) : illustrations (chiefly color), color charts. |
| Supplemental Content | https://purl.fdlp.gov/GPO/LPS125009 |
| Subjects |
| Series | ARL-TR ; 3370 ARL-TR (Aberdeen Proving Ground, Md.) ; 3370. ^A566074 |
| General note | Title from PDF title screen (viewed on Aug. 10, 2010). |
| General note | "November 2004." |
| Bibliography note | Includes bibliographical references (p. 11-12). |
| Report note | Final report. |
| GPO item number | 0324-A-01 (online) |
| Govt. docs number | D 101.133:3370 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Electronic Resources | Access Content Online | ✔ Available |