Chemical vapour deposition : precursors, processes and applications / edited by Anthony C. Jones, Michael L. Hitchman.

Other author Jones, Anthony C.
Other author Hitchman, Michael L.
Format Book
Publication InfoCambridge, UK : Royal Society of Chemistry, ©2009.
Descriptionxv, 582 pages : illustrations, plans ; 26 cm
Subjects

Variant title Chemical vapor deposition
Bibliography noteIncludes bibliographical references and index.
LCCN 2009419379
ISBN9780854044658 (hbk.)
ISBN0854044655 (hbk.)

Availability

Library Location Call Number Status Item Actions
Joyner General Stacks TS695 .C535 2009 ✔ Available Place Hold