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LEADER 01565cam a2200361 a 4500

001 ocm09488619;

005 20141212042650.0;

008 830420s1983 wb a b 101 0 eng ;

010 a| 83006689;

020 a| 0387124918 (U.S.);

035 a| (Sirsi) o09488619;

035 a| (OCoLC)9488619;

040 a| DLCc| DLCd| EREd| UtOrBLW;

049 a| ERE*;

050 00 a| TK7871.85b| .I5864 1983;

082 0 a| 621.3815/22| 19;

245 00 a| Ion implantation :b| equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 /c| editors, H. Ryssel and H. Glawischnig.;

260 a| Berlin ;a| New York :b| Springer-Verlag,c| 1983.;

300 a| x, 556 pages :b| illustrations ;c| 24 cm.;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

490 0 a| Springer series in electrophysics ; v. 2 ;v| v. 11;

504 a| Includes bibliographical references and index.;

650 0 a| Ion implantationv| Congresses.=| ^A654203;

650 0 a| Semiconductor dopingv| Congresses.=| ^A1242416;

700 1 a| Ryssel, Heiner,d| 1941-=| ^A655155;

700 1 a| Glawischnig, H.q| (Hans),d| 1939-=| ^A142637;

711 2 a| International Conference on Ion Implantation: Equipment and Techniquesn| (4th :d| 1982 :c| Berchtesgaden, Germany)?| UNAUTHORIZED;

919 a| BOOK;

596 a| 1;

998 a| 200979;

999 a| TK7871.85 .I5864 1983w| LCc| 1i| 310372002303664d| 4/3/2013f| 4/3/2013g| 3l| JGESm| JOYNERr| Ys| Yt| JGESBKu| 8/11/1986x| BOOKz| JSTACKSo| .STAFF. 0o| .STAFF. Copy Statement : c.1;

Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig.

Other author	Ryssel, Heiner, 1941-
Other author	Glawischnig, H. (Hans), 1939-
Other author	International Conference on Ion Implantation: Equipment and Techniques 1982 : Berchtesgaden, Germany)
Format	Book
Publication Info	Berlin ; New York : Springer-Verlag, 1983.
Description	x, 556 pages : illustrations ; 24 cm.
Subjects	Ion implantation--Congresses. Semiconductor doping--Congresses.

Series	Springer series in electrophysics ; v. 2 ; v. 11
Bibliography note	Includes bibliographical references and index.
LCCN	83006689
ISBN	0387124918 (U.S.)

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Library	Location	Call Number	Status	Item Actions
Joyner	General Stacks	TK7871.85 .I5864 1983	✔ Available	Place Hold

Ion implantation : equipment and techniques : proceedings of the Fourth International Conference, Berchtesgaden, Fed. Rep. of Germany, September 13-17, 1982 / editors, H. Ryssel and H. Glawischnig.

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