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LEADER 01533cam a22004334a 4500

001 ocn226308133;

003 OCoLC;

005 20141212013156.0;

008 080421s2009 waua b 001 0 eng ;

010 a| 2008018045;

020 a| 9780819469649 (SPIE);

020 a| 0819469645 (SPIE);

020 a| 9780470471555 (Wiley);

020 a| 0470471557 (Wiley);

035 a| (Sirsi) o226308133;

035 a| (OCoLC)226308133;

049 a| EREE;

050 04 a| QC459b| .E98 2009;

082 00 a| 621.38152| 22;

245 00 a| EUV lithography /c| Vivek Bakshi, editor.;

300 a| xxvii, 673 pages :b| illustrations ;c| 27 cm;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

504 a| Includes bibliographical references and index.;

650 0 a| Ultraviolet radiationx| Industrial applications.=| ^A687396;

650 0 a| Photolithography.=| ^A151248;

650 0 a| Optical coatings.=| ^A163750;

700 1 a| Bakshi, Vivek.=| ^A1206958;

994 a| 92b| ERE;

910 a| PromptCat;

938 a| Baker and Taylorb| BTCPn| 2008018045;

938 a| YBP Library Servicesb| YANKn| 100511267;

980 a| 2009-03-31b| 105d| 0e| 88.2f| 669473g| 30372013112674h| 40016531450i| QC 459 .E98 2009;

596 a| 1;

998 a| 1485919;

999 a| QC459 .E98 2009w| LCc| 1i| 30372013112674d| 4/17/2009l| JGESm| JOYNERr| Ys| Yt| JGESBKu| 4/8/2009x| BOOKz| JSTACKSo| .STAFF. 0;

EUV lithography / Vivek Bakshi, editor.

Other author	Bakshi, Vivek.
Format	Book
Publication Info	Bellingham, Wash. : SPIE Press ; Hoboken, NJ : John Wiley, ©2009.
Description	xxvii, 673 pages : illustrations ; 27 cm
Subjects	Ultraviolet radiation--Industrial applications. Photolithography. Optical coatings.

Bibliography note	Includes bibliographical references and index.
LCCN	2008018045
ISBN	9780819469649 (SPIE)
ISBN	0819469645 (SPIE)
ISBN	9780470471555 (Wiley)
ISBN	0470471557 (Wiley)

Library	Location	Call Number	Status	Item Actions
Joyner	General Stacks	QC459 .E98 2009	✔ Available	Place Hold

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