Tools

LEADER 01270cam a2200361 i 4500

001 ocm02400851;

005 20141211193058.0;

008 760810s1976 enka b 001 0 eng ;

010 a| 75196983;

015 a| GB***;

020 a| 0126969507;

035 a| (Sirsi) o02400851;

035 a| (OCoLC)2400851;

040 a| DLCc| DLCd| EREd| UtOrBLW;

049 a| ERE*;

050 00 a| QC702.7.I55b| T67;

082 0 a| 530.4/1;

100 1 a| Townsend, P. D.q| (Peter David)=| ^A354324;

245 10 a| Ion implantation, sputtering and their applications /c| by P. D. Townsend, J. C. Kelly, N. E. W. Hartley.;

260 a| London ;a| New York :b| Academic Press,c| 1976.;

300 a| ix, 333 pages :b| illustrations ;c| 24 cm;

336 a| text2| rdacontent;

337 a| unmediated2| rdamedia;

338 a| volume2| rdacarrier;

504 a| Includes bibliographies and index.;

650 0 a| Ion implantation.=| ^A44637;

650 0 a| Sputtering (Physics)=| ^A86238;

700 1 a| Kelly, J. C.q| (John Clive)=| ^A633625;

700 1 a| Hartley, N. E. W.?| UNAUTHORIZED;

919 a| BOOK;

596 a| 1;

998 a| 106642;

999 a| QC702.7.I55 T67w| LCc| 1i| 310372001264891d| 11/9/2001e| 9/28/2001l| JGESm| JOYNERn| 8r| Ys| Yt| JGESBKu| 4/21/1986x| BOOKz| JSTACKSo| .STAFF. 0o| .STAFF. Copy Statement : c.1;

Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley.

Author/creator	Townsend, P. D.
Other author	Kelly, J. C. (John Clive)
Other author	Hartley, N. E. W.
Format	Book
Publication Info	London ; New York : Academic Press, 1976.
Description	ix, 333 pages : illustrations ; 24 cm
Subjects	Ion implantation. Sputtering (Physics)

Bibliography note	Includes bibliographies and index.
LCCN	75196983
ISBN	0126969507

Availability

Library	Location	Call Number	Status	Item Actions
Joyner	General Stacks	QC702.7.I55 T67	✔ Available	Place Hold

Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley.

Click here for more information about this title

Availability