Measurement methods for the semiconductor device industry : a summary of NBS activity / W. Murray Bullis.

Author/creator Bullis, W. Murray, 1930-
Other author Institute for Applied Technology (U.S.)
Other author United States. National Bureau of Standards.
Other author United States. Department of Commerce.
Format Book
Publication[Washington, D.C.] : National Bureau of Standards, 1969.
Descriptionii, 22 pages : illustrations, charts ; 27 cm
Subjects

SeriesU.S. National Bureau of Standards. Technical note ; 511
NBS technical note ; 511. ^A4336
General noteIssued December 1969.
General noteElectronic Technology Division, Institute for Applied Technology.
General noteGPO Historic Shelflist Project- publication not in hand.
General noteGPO Cataloging Record Distribution Program (CRDP).
Bibliography noteIncludes bibliographical references (pages 13-15).
GPO item number0249-A
Govt. docs number C 13.46:511

Availability

Library Location Call Number Status Item Actions
Joyner Fed Docs Stacks C 13.46:511 ✔ Available Place Hold