Semiconductor measurement technology : spreading resistance analysis for silicon layers with nonuniform resistivity / David H. Dickey and James R. Ehrstein.
| Author/creator | Dickey, David H. |
| Other author | Ehrstein, James R. |
| Format | Book |
| Publication Info | Washington : U.S. Dept. of Commerce, National Bureau of Standards : For sale by the Supt. of Docs., U.S. G.P.O., 1979. |
| Description | vi, 65 pages : illustrations ; 26 cm. |
| Subjects |
| Portion of title | Spreading resistance analysis for silicon layers with nonuniform resistivity |
| Series | NBS special publication ; 400-48 NBS special publication 400-48. ^A2701 |
| General note | "This activity was supported by the Defense Advanced Research Projects Agency." |
| General note | "Issued May 1979." |
| LCCN | 79607012 |
| Govt. docs number | C 13.10:400-48 |
Availability
| Library | Location | Call Number | Status | Item Actions |
|---|---|---|---|---|
| Joyner | Fed Docs Stacks | C 13.10:400-48 | ✔ Available | Place Hold |