Ultra clean processing of semiconductor surfaces XII : selected, peer reviewed papers from the 12th International Symposium on Ultra Clean Processing of Semiconductor Surfaces (UCPSS) September 21-24, 2014, Brussels, Belgium / edited by Paul Mertens, Marc Meuris and Marc Heyns.
| Author/creator | International Symposium on Ultra Clean Processing of Semiconductor Surfaces 2014 : Brussels, Belgium) |
| Other author/creator | Mertens, Paul. |
| Other author/creator | Meuris, Marc. |
| Other author/creator | Heyns, Marc. |
| Format | Electronic and Book |
| Publication Info | Pfaffikon, Switzerland : TTP, 2015. |
| Description | 331 pages : illustrations ; 25 cm |
| Supplemental Content | Full text available from Ebook Central - Academic Complete |
| Subject(s) |
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| Series | Solid State Phenomena, 1662-7799 ; Volume 219 Diffusion and defect data. Pt. B, Solid state phenomena ; v. 219. ^A1003549 |
| Bibliography note | Includes bibliographical references at the end of each chapters and indexes. |
| Access restriction | Available only to authorized users. |
| Technical details | Mode of access: World Wide Web |
| Genre/form | Electronic books. |
| LCCN | 2015413756 |
| ISBN | 303835242X |
| ISBN | 9783038352426 |
Available Items
| Library | Location | Call Number | Status | Item Actions | |
| Electronic Resources | Access Content Online | ✔ Available |